Patent Assignment
Reel/Frame 032857/0992
Assignment of Assignor's Interest
Recorded: 2014-05-09
Pages: 6
Assignors
KAMEDA, KENJI
Executed: 2014-03-24
SONOBE, JUN
Executed: 2013-05-02
TADAKI, YUDAI
Executed: 2013-05-16
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, 75007, FRANCE
Covered Property
(1)
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 12, 2016
From: L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 037726/0567 →
Assignment of Assignor's Interest
Dec 31, 2018
From: HITACHI KOKUSAI ELECTRIC INC.
To: KOKUSAI ELECTRIC CORPORATION
Reel/Frame 047995/0490 →