Patent Assignment
Reel/Frame 037726/0567
Assignment of Assignor's Interest
Recorded: 2016-02-12
Pages: 3
Assignor
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
May 9, 2014
From: KAMEDA, KENJI; SONOBE, JUN; TADAKI, YUDAI
To: HITACHI KOKUSAI ELECTRIC INC.; L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 032857/0992 →
Assignment of Assignor's Interest
Dec 31, 2018
From: HITACHI KOKUSAI ELECTRIC INC.
To: KOKUSAI ELECTRIC CORPORATION
Reel/Frame 047995/0490 →