Patent Assignment
Reel/Frame 032872/0848
Assignment of Assignor's Interest
Recorded: 2014-05-12
Pages: 4
Assignors
INGLE, NITIN K.
Executed: 2014-03-12
LUBOMIRSKY, DMITRY
Executed: 2014-03-13
CHEN, XINGLONG
Executed: 2014-05-07
VENKATARAMAN, SHANKAR
Executed: 2014-03-17
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Enhanced Etching Processes Using Remote Plasma Sources