Patent Assignment
Reel/Frame 033252/0528
Assignment of Assignor's Interest
Recorded: 2014-07-07
Pages: 7
Assignors
NODA, TAKAAKI
Executed: 2014-04-02
NOHARA, SHINGO
Executed: 2014-03-31
HIROSE, YOSHIRO
Executed: 2014-03-27
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU,, TOKYO, 1018980, JAPAN
Covered Property
(1)
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.