Patent Assignment
Reel/Frame 033253/0350
Assignment of Assignor's Interest
Recorded: 2014-07-07
Pages: 3
Assignor
SHINDO, TAKEHIRO
Executed: 2014-07-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Method with a Second Positioning Step