Patent Assignment
Reel/Frame 033292/0265
Assignment of Assignor's Interest
Recorded: 2014-07-11
Pages: 3
Assignors
CHENG, CHUNG-LIANG
Executed: 2014-06-04
CHEN, YEN-YU
Executed: 2014-06-04
LEE, CHANG-SHENG
Executed: 2014-06-04
ZHANG, WEI
Executed: 2014-06-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Planarization Method, Method for Polishing Wafer, and Cmp System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.