IP Library Assignment 033406/0907
Patent Assignment
Reel/Frame 033406/0907

Assignment of Assignor's Interest

Recorded: 2014-07-29 Pages: 7
Assignors
FRANK, THOMAS
Executed: 2014-07-03
SEITZ, HOLGER
Executed: 2014-07-03
LAENGLE, MARIO
Executed: 2014-07-16
MATEJKA, ULRICH
Executed: 2014-07-04
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07745 JENA, GERMANY
Covered Property (1)
Illumination Optical Unit for a Metrology System and Metrology System Comprising Such an Illumination Optical Unit
Patent: 9,904,060 →
Application: 14/311,420 →
Publication: US 2015/0001408
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jul 29, 2014
From: DOERING, DIRK
To: CARL ZEISS AG
Reel/Frame 033406/0923 →
Merger Sep 19, 2016
From: CARL ZEISS SMS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 040069/0705 →