Patent Assignment
Reel/Frame 033406/0907
Assignment of Assignor's Interest
Recorded: 2014-07-29
Pages: 7
Assignors
FRANK, THOMAS
Executed: 2014-07-03
SEITZ, HOLGER
Executed: 2014-07-03
LAENGLE, MARIO
Executed: 2014-07-16
MATEJKA, ULRICH
Executed: 2014-07-04
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07745 JENA, GERMANY
Covered Property
(1)
Illumination Optical Unit for a Metrology System and Metrology System Comprising Such an Illumination Optical Unit
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.