Assignment of Assignor's Interest

Recorded: 2014-07-29 Pages: 3

Assignor

DOERING, DIRK

Executed: 2014-07-04

Assignee

CARL ZEISS AG

DEP. CLP-PS, 73446 OBERKOCHEN, GERMANY

Covered Property (1)

Illumination Optical Unit for a Metrology System and Metrology System Comprising Such an Illumination Optical Unit

Patent: 9,904,060 →

Application: 14/311,420 →

Publication: US 2015/0001408

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.