Patent Assignment
Reel/Frame 033423/0736
Assignment of Assignor's Interest
Recorded: 2014-07-30
Pages: 7
Assignors
OMSTEAD, THOMAS R.
Executed: 2014-07-25
RUFFELL, SIMON
Executed: 2014-07-25
MA, TRISTAN
Executed: 2014-07-25
WRIGHT, ETHAN A.
Executed: 2014-07-25
HAUTALA, JOHN
Executed: 2014-07-25
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
High Efficiency Apparatus and Method for Depositing a Layer on a Three Dimensional Structure