Patent Assignment
Reel/Frame 033506/0866
Assignment of Assignor's Interest
Recorded: 2014-08-11
Pages: 4
Assignors
IWABUCHI, MOTOAKI
Executed: 2014-07-23
OGIHARA, TSUTOMU
Executed: 2014-07-23
HOSHI, YUKIO
Executed: 2014-07-23
BIYAJIMA, YUSUKE
Executed: 2014-07-23
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Manufacturing a Resist Composition