Assignment of Assignor's Interest

Recorded: 2014-08-12 Pages: 4

Assignors

HIRANO, TAICHI

Executed: 2014-08-04

KUMAGAI, FUMITOSHI

Executed: 2014-08-04

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Power Supply System, Plasma Etching Apparatus, and Plasma Etching Method

Patent: 9,922,802 →

Application: 14/376,697 →

Publication: US 2015/0000842