Patent Assignment
Reel/Frame 033604/0570
Assignment of Assignor's Interest
Recorded: 2014-08-25
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Forming a Semiconductor Device Comprising Titanium Silicon Oxynitride