Patent Assignment
Reel/Frame 033711/0383
Assignment of Assignor's Interest
Recorded: 2014-09-10
Pages: 4
Assignor
ITATANI, HIDEHARU
Executed: 2014-09-08
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device and Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.