Assignment of Assignor's Interest

Recorded: 2014-09-17 Pages: 4

Assignors

TAKABA, HIROYUKI

Executed: 2014-09-01

MATSUOKA, HIRONORI

Executed: 2014-09-09

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Method for Etching Organic Film and Plasma Etching Device

Patent: 9,293,346 →

Application: 14/385,820 →

Publication: US 2015/0064924