Method for etching organic film and plasma etching device
In a method for etching an organic film according to an embodiment, a target object that has an organic film is set in a processing chamber. Then, a processing gas containing COS gas and O 2 gas is supplied to the processing chamber and a microwave for plasma excitation is supplied to the inside of the processing chamber to etch the organic film.
1. A method for etching an organic film, comprising:
preparing in a processing chamber a target object having an organic film; and
etching the organic film to provide a patterned organic film by supplying a processing gas including COS gas and O 2 gas into the processing chamber and supplying a microwave for plasma excitation into the processing chamber, wherein SO radicals are dissociated from the COS gas and adsorbed on a sidewall of the patterned organic film formed by said etching.
2. The method of claim 1 , wherein the target object includes a substrate and a multilayer film formed on the substrate, the multilayer film having a patterned resist film and the organic film formed between the patterned resist film and the substrate.
3. The method of claim 2 , wherein in the etching the organic film, the processing gas further includes N 2 gas.
4. The method of claim 2 , wherein in the etching the organic film, a pressure in the processing chamber is controlled to a range from 20 mTorr to 100 mTorr.
5. The method of claim 2 , wherein the multilayer film has a Si anti-reflection coating film provided between the patterned resist film and the organic film, and
the method further comprises, before the etching the organic film, etching the Si anti-reflection coating film by supplying an etching gas including a fluorocarbon-based gas and COS gas into the processing chamber and supplying a microwave into the processing chamber, wherein S radicals are dissociated from the COS gas included in the etching gas and are adsorbed on a surface of the patterned resist film.
6. A plasma etching device comprising:
a processing chamber;
a gas supply unit configured to supply a processing gas including COS gas and O 2 gas into the processing chamber;
a microwave generating unit; and
an antenna, connected to the microwave generating unit, configured to supply a microwave for plasma excitation into the processing chamber so that SO radicals are dissociated from the COS gas.
7. The plasma etching device of claim 6 , wherein processing gas further includes N 2 gas.
8. The plasma etching device of claim 7 , wherein the gas supply unit includes a unit configured to control a flow rate ratio of the N 2 gas and the O 2 gas.
9. The plasma etching device of claim 6 , further comprising a pressure controller configured to control a pressure in the processing chamber.
10. The plasma etching device of claim 9 , wherein the pressure controller controls the pressure in the processing chamber to a range from 20 mTorr to 100 mTorr.
11. The plasma etching device of claim 6 , wherein the gas supply unit further configured to supply another processing gas including a fluorocarbon-based gas and COS gas.