Patent Assignment
Reel/Frame 033765/0841
Assignment of Assignor's Interest
Recorded: 2014-09-18
Pages: 5
Assignees
PIEZONICS CO., LTD.
35-3 HONGCHON-RI, IBJANG-MYON CHEONAN-SI,, CHUNGNAM, 331-825, KOREA, REPUBLIC OF
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
35-3 HONGCHON-RI, IBJANG-MYON CHEONAN-SI,, CHUNGNAM, 331-825, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus of Chemical Vapor Deposition with a Showerhead Regulating Injection Velocity of Reactive Gases Positively and Method Thereof