Patent Assignment
Reel/Frame 033799/0950
Assignment of Assignor's Interest
Recorded: 2014-09-23
Pages: 5
Assignors
HATAKEYAMA, JUN
Executed: 2014-08-22
KATAYAMA, KAZUHIRO
Executed: 2014-08-22
TACHIBANA, SEIICHIRO
Executed: 2014-08-22
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process