Patent Assignment
Reel/Frame 033803/0262
Assignment of Assignor's Interest
Recorded: 2014-09-24
Pages: 7
Assignors
SANO, ATSUSHI
Executed: 2014-09-16
ASAI, MASAYUKI
Executed: 2014-09-22
YONEBAYASHI, MASAHIRO
Executed: 2014-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device, Method for Processing Substrate, Substrate Processing Device and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.