Patent Assignment
Reel/Frame 033811/0630
Assignment of Assignor's Interest
Recorded: 2014-09-24
Pages: 3
Assignors
MIYAKAWA, TAKAHIRO
Executed: 2014-09-20
SATO, KAZUHIRO
Executed: 2014-08-29
MINODA, KEN
Executed: 2014-08-29
INA, HIDEKI
Executed: 2014-08-29
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Measuring Apparatus, Imprint System, Measuring Method, and Device Manufacturing Method