Patent Assignment
Reel/Frame 033821/0121
Assignment of Assignor's Interest
Recorded: 2014-09-25
Pages: 7
Assignors
HASHIMOTO, YOSHITOMO
Executed: 2014-09-16
HIROSE, YOSHIRO
Executed: 2014-09-16
MATSUOKA, TATSURU
Executed: 2014-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.