Patent Assignment
Reel/Frame 033980/0682
Assignment of Assignor's Interest
Recorded: 2014-10-20
Pages: 4
Assignors
SENZAKI, SHIGERU
Executed: 2014-09-22
SAITO, MICHISHIGE
Executed: 2014-09-22
SATOH, DAIKI
Executed: 2014-09-22
HORIUCHI, KEN
Executed: 2014-09-22
ANDO, KOJI
Executed: 2014-09-22
KOIWA, SHINGO
Executed: 2014-09-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Maintenance Method Thereof