Patent Assignment
Reel/Frame 034039/0226
Assignment of Assignor's Interest
Recorded: 2014-10-27
Pages: 4
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1 KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Etching Amount Measurement Apparatus for Dry Etching Apparatus