Assignment of Assignor's Interest

Recorded: 2014-11-03 Pages: 5

Assignors

VELDMAN, ANDREI

Executed: 2014-10-29

BAKEMAN, MICHAEL S.

Executed: 2014-11-03

SHCHEGROV, ANDREI V.

Executed: 2014-10-29

MIEHER, WALTER D.

Executed: 2014-10-29

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (2)

Methods and Apparatus for Measuring Semiconductor Device Overlay Using X-Ray Metrology

Patent: 9,885,962 →

Application: 14/521,966 →

Publication: US 2015/0117610

Method and Apparatus for Measuring Semiconductor Device Overlay and Critical Dimensions Using X-ray Metrology Technologies

Application: 61/896,230 →