Patent Application
Provisional
App. No. 61/896,230
· Confirmation No. 4683
Method and Apparatus for Measuring Semiconductor Device Overlay and Critical Dimensions Using X-ray Metrology Technologies
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-11-19 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-10-28 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2013-10-28 | SPEC |
Specification | 10 | View | |
| 2013-10-28 | CLM |
Claims | 3 | View | |
| 2013-10-28 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-10-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Andrei Veldman
Santa Clara, CA
Michael S. Bakeman
San Jose, CA
Andrei V. Shchegrov
Campbell, CA
Walter D. Mieher
Los Gatos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P4292
- Confirmation No.
- 4683
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-11-03
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Quick Facts
- App. No.
- 61/896,230
- Filed
- 2013-10-28
External Links