Patent Assignment
Reel/Frame 034157/0455
Assignment of Assignor's Interest
Recorded: 2014-11-12
Pages: 8
Assignors
KANEKO, MIYAKO
Executed: 2014-10-30
TANOUCHI, KEIJI
Executed: 2014-10-30
ORII, TAKEHIKO
Executed: 2014-10-30
KANNO, ITARU
Executed: 2014-11-04
AIBARA, MEITOKU
Executed: 2014-10-24
TANAKA, SATORU
Executed: 2014-10-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Cleaning Method, Substrate Cleaning System, and Memory Medium