Patent Assignment
Reel/Frame 034199/0933
Assignment of Assignor's Interest
Recorded: 2014-11-18
Pages: 8
Assignors
ANDERL, WILLI
Executed: 2014-10-23
WEIGL, BERNHARD
Executed: 2014-11-06
WANDNER, ANN-KATHRIN
Executed: 2014-10-11
KIEREY, HOLGER
Executed: 2014-10-09
SCHMITTNER, ARNO
Executed: 2014-10-10
BAUER, MARKUS
Executed: 2014-11-11
SCHMELZEISEN, MARCUS
Executed: 2014-10-23
KOLLOCH, ANDREAS
Executed: 2014-10-14
Assignee
CARL ZEISS LASER OPTICS GMBH
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Cooler for Plasma Generation Chamber of Euv Radiation Source
Application:
14/492,949 →
Publication:
US 2015/0083938
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.