Patent Assignment
Reel/Frame 034374/0954
Assignment of Assignor's Interest
Recorded: 2014-12-04
Pages: 7
Assignors
WEST, BRIAN
Executed: 2014-11-10
PARKHE, VIJAY
Executed: 2014-11-10
HIRAHARA, ROBERT
Executed: 2014-11-11
DEYO, DAN
Executed: 2014-11-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Support Chuck Cooling for Deposition Chamber