Patent Assignment
Reel/Frame 034447/0161
Assignment of Assignor's Interest
Recorded: 2014-12-10
Pages: 4
Assignor
ISHIBASHI, TOMOATSU
Executed: 2014-11-17
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus Comprising a Second Jet Nozzle Surrounding a First Jet Nozzle