Patent Assignment
Reel/Frame 034540/0284
Assignment of Assignor's Interest
Recorded: 2014-12-18
Pages: 5
Assignors
TAKAYAMA, WATARU
Executed: 2014-12-12
MATSUYAMA, SHOICHIRO
Executed: 2014-12-12
NOGAMI, SUSUMU
Executed: 2014-12-12
TAMURA, DAISUKE
Executed: 2014-12-12
HAYASHI, KYOSUKE
Executed: 2014-12-12
KAWANOBE, JUN
Executed: 2014-12-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device