Patent Assignment
Reel/Frame 034575/0212
Assignment of Assignor's Interest
Recorded: 2014-12-23
Pages: 3
Assignors
WAKIYAMA, TERUFUMI
Executed: 2014-12-05
ITO, NORIHIRO
Executed: 2014-12-05
HIGASHIJIMA, JIRO
Executed: 2014-12-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus