Patent Assignment
Reel/Frame 034790/0652
Assignment of Assignor's Interest
Recorded: 2015-01-22
Pages: 5
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129 SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Sputtering Apparatus and Method Thereof