Patent Assignment
Reel/Frame 034812/0528
Assignment of Assignor's Interest
Recorded: 2015-01-26
Pages: 6
Assignors
WADA, YUICHI
Executed: 2015-01-19
ASHIHARA, HIROSHI
Executed: 2015-01-21
TATENO, HIDETO
Executed: 2015-01-21
SAKUMA, HARUNOBU
Executed: 2015-01-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.