Patent Assignment
Reel/Frame 034876/0698
Assignment of Assignor's Interest
Recorded: 2015-02-03
Pages: 4
Assignors
AKAHANE, SAIKO
Executed: 2014-12-18
HAMAMOTO, YOSHIHIRA
Executed: 2014-12-18
SHIOBARA, TOSHIO
Executed: 2014-12-22
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate and Semiconductor Apparatus