Patent Assignment
Reel/Frame 034926/0916
Assignment of Assignor's Interest
Recorded: 2015-02-10
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
De-Chuck Control Method and Plasma Processing Apparatus