Patent Assignment
Reel/Frame 034978/0095
Assignment of Assignor's Interest
Recorded: 2015-02-18
Pages: 5
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Method and Apparatus for Controlling Film Deposition
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.