Patent Assignment
Reel/Frame 035627/0165
Confirmatory License
Recorded: 2015-05-08
Pages: 2
Assignor
MASSACHUSETTS INSITUTE OF TECHNOLOGY
Executed: 2013-08-09
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Method and Apparatus for Controlling Film Deposition
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 18, 2015
From: BULOVIC, VLADIMIR; SCHMIDT, MARTIN A.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 034978/0095 →
Assignment of Assignor's Interest
Feb 25, 2015
From: CHEN, JIANGLONG; MADIGAN, CONOR F.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 035031/0694 →