IP Library Granted Patent US 8,962,073
Granted Patent B2
US 8,962,073 · App. 13/778,072 · Granted Feb 24, 2015

Method and apparatus for controlling film deposition

Inventors: Vladimir Bulovic (Lexington, MA); Jianglong Chen (San Jose, CA); Conor F. Madigan (San Francisco, CA); Martin A. Schmidt (Reading, MA)
Assignee: Massachusetts Institute of Technology
B41J2/04588B05B17/0638B41J2/14B41J2/07H05B33/10B41J2/04581B41J2202/09B41J2202/16H01L51/0005H01L51/56
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Quick Facts
Patent No.
US 8,962,073
App. No.
13/778,072
Granted
Feb 24, 2015
Kind
B2
Abstract

The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

Claims (19)

1. A method to deposit ink on a substrate, the method comprising:

providing a quantity of ink to a chamber, the ink having a plurality of suspended particles in a carrier liquid;

metering at least a portion of the ink delivered from the chamber to an inlet of a discharge nozzle by activating a dispenser to dispense a quantity of metered ink;

receiving the metered ink at a discharge nozzle, the discharge nozzle having an inlet port and an outlet port;

transporting the metered ink from the inlet port to the outlet port of the discharge nozzle forming substantially solid particles; and

depositing the substantially solid particles from the outlet port of the discharge nozzle onto a substrate by energizing the discharge nozzle to pulsatingly eject at least a portion of the substantially solid particles onto the substrate.

2. The method of claim 1 , wherein the step of metering at least a portion of the ink further comprises providing a plurality of energy pulses to the dispenser, each energy pulse defined by at least one of an amplitude of the pulse, a duration of the pulse, or a frequency of the pulse.

3. The method of claim 1 , wherein the step of metering at least a portion of the ink further comprises providing a plurality of energy pulses to a piezoelectric element associated with the chamber, each energy pulse defined by at least one of amount or duration.

4. The method of claim 1 , wherein the inlet port and the outlet port are separated by a plurality of conduits.

5. The method of claim 1 , wherein the inlet port and the outlet port are separated by a porous material.

6. The method of claim 1 , wherein the inlet port and the outlet port are separated by a plurality of conduits having a tortuous path.

7. The method of claim 1 , wherein the inlet port and the outlet port are substantially at the same location.

8. The method of claim 1 , further comprising substantially simultaneously evaporating the carrier liquid and transporting the metered ink from the inlet port to the outlet port of the discharge nozzle.

9. A method to provide accurate deposition of ink on a substrate, the method comprising:

providing a quantity of ink to a chamber, the ink having a plurality of suspended particles in a carrier liquid;

metering at least a portion of the ink delivered from the chamber to an inlet of a discharge nozzle by activating a dispenser to dispense a quantity of metered ink;

receiving the metered ink at a discharge nozzle, the discharge nozzle having an inlet port and an outlet port, the inlet and the outlet port separated by a conduit;

transporting the metered ink from the inlet port to the outlet port of the discharge nozzle forming substantially solid particles; and

depositing the substantially solid particles from the outlet port of the discharge nozzle onto a substrate by energizing the discharge nozzle to pulsatingly eject at least a portion of the substantially solid particles onto the substrate.

Assignments (3)
CONFIRMATORY LICENSE Recorded May 8, 2015
From: MASSACHUSETTS INSITUTE OF TECHNOLOGY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 035627/0165 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 25, 2015
From: CHEN, JIANGLONG; MADIGAN, CONOR F.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 035031/0694 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2015
From: BULOVIC, VLADIMIR; SCHMIDT, MARTIN A.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 034978/0095 →
Continuity (8)
Continuation 13080626 · Apr 5, 2011
Continuation 12139404 · Jun 13, 2008
Continuation 13778072
Continuation In Part 13095619 · Apr 27, 2011
Division 11282472 · Nov 21, 2005
Provisional Application 60944000 · Jun 14, 2007
Provisional Application 60629312 · Nov 19, 2004
Related Publication 20140063094A1 · Mar 6, 2014