Patent Assignment
Reel/Frame 035015/0535
Assignment of Assignor's Interest
Recorded: 2015-02-24
Pages: 6
Assignors
NISHIMURA, EIICHI
Executed: 2015-01-22
SHIMIZU, AKITAKA
Executed: 2015-01-27
YAMASHITA, FUMIKO
Executed: 2015-02-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Substrate Processing Apparatus