Patent Assignment
Reel/Frame 035097/0005
Assignment of Assignor's Interest
Recorded: 2015-03-05
Pages: 5
Assignors
BAKEMAN, MICHAEL S.
Executed: 2015-01-13
SHCHEGROV, ANDREI V.
Executed: 2015-01-15
LEVY, ADY
Executed: 2015-01-14
ZHUANG, GUORONG V.
Executed: 2015-01-14
HENCH, JOHN J.
Executed: 2015-01-14
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Small-Angle Scattering X-Ray Metrology Systems and Methods
Small-Angle Scattering X-ray Metrology System and Method With Optimized Illumination Optics
Application:
61/893,341 →