Patent Application
Provisional
App. No. 61/893,341
· Confirmation No. 7749
Small-Angle Scattering X-ray Metrology System and Method With Optimized Illumination Optics
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-11-12 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-10-21 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-10-21 | SPEC |
Specification | 10 | View | |
| 2013-10-21 | CLM |
Claims | 2 | View | |
| 2013-10-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-10-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Michael S. Bakeman
San Jose, CA
Andrei V. Shchegrov
Campbell, CA
Ady Levy
Sunnyvale, CA
Guorong V. Zhuang
Santa Clara, CA
Walter Dean Mieher
Los Gatos, CA
John Hench
Los Gatos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P4283
- Confirmation No.
- 7749
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-03-05
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Quick Facts
- App. No.
- 61/893,341
- Filed
- 2013-10-21
External Links