Patent Assignment
Reel/Frame 035130/0559
Assignment of Assignor's Interest
Recorded: 2015-03-10
Pages: 7
Assignors
ISHIZAKA, TADAHIRO
Executed: 2015-02-27
SAKUMA, TAKASHI
Executed: 2015-03-03
YOKOYAMA, OSAMU
Executed: 2015-02-27
MATSUMOTO, KENJI
Executed: 2015-03-04
CHANG, PENG
Executed: 2015-03-04
NAGAI, HIROYUKI
Executed: 2015-03-04
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming Copper Wiring