Patent Assignment
Reel/Frame 035239/0096
Assignment of Assignor's Interest
Recorded: 2015-03-24
Pages: 3
Assignors
MEISSL, MARIO JOHANNES
Executed: 2014-11-18
CHERALA, ANSHUMAN
Executed: 2014-11-18
CHOI, BYUNG-JIN
Executed: 2014-11-07
BAMESBERGER, SETH J.
Executed: 2014-11-18
Assignee
CANON NANOTECHNOLOGIES, INC.
1807-C WEST BRAKER LN STE 300, AUSTIN, TEXAS, 78758
Covered Property
(1)
Low Contact Imprint Lithography Template Chuck System for Improved Overlay Correction