Patent Assignment
Reel/Frame 035243/0817
Assignment of Assignor's Interest
Recorded: 2015-03-24
Pages: 3
Assignors
NAKATANI, KIMIHIKO
Executed: 2015-03-11
HARADA, KAZUHIRO
Executed: 2015-03-13
ASHIHARA, HIROSHI
Executed: 2015-03-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.