Patent Assignment
Reel/Frame 035267/0007
Assignment of Assignor's Interest
Recorded: 2015-03-26
Pages: 3
Assignors
SUDA, ATSUHIKO
Executed: 2015-03-11
SHIMAMOTO, SATOSHI
Executed: 2015-03-11
OHASHI, NAOFUMI
Executed: 2015-03-11
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA, 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.