Patent Assignment
Reel/Frame 035285/0921
Assignment of Assignor's Interest
Recorded: 2015-03-30
Pages: 4
Assignors
LIANG, XIAOGAN
Executed: 2015-03-18
NAM, HONGSUK
Executed: 2015-03-18
WI, SUNGJIN
Executed: 2015-03-18
CHEN, MIKAI
Executed: 2015-03-18
Assignee
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
1600 HURON PARKWAY, 2ND FLOOR, ANN ARBOR, MICHIGAN, 48109-2590
Covered Property
(1)
Plasma-Assisted Techniques for Fabricating Semiconductor Devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.