Patent Assignment
Reel/Frame 036032/0901
Confirmatory License
Recorded: 2015-06-29
Pages: 2
Assignor
UNIVERSITY OF MICHIGAN
Executed: 2015-06-17
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Plasma-Assisted Techniques for Fabricating Semiconductor Devices
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.