Patent Assignment
Reel/Frame 035300/0969
Assignment of Assignor's Interest
Recorded: 2015-03-31
Pages: 7
Assignors
SUGITA, KIPPEI
Executed: 2015-03-26
YAMAGUCHI, TATSUYA
Executed: 2015-03-03
MORISADA, YOSHINORI
Executed: 2015-03-03
FUJIKAWA, MAKOTO
Executed: 2015-03-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Improving Chemical Resistance of Polymerized Film, Polymerized Film Forming Method, Film Forming Apparatus, and Electronic Product Manufacturing Method