Patent Assignment
Reel/Frame 035345/0572
Assignment of Assignor's Interest
Recorded: 2015-04-07
Pages: 6
Assignors
TAKAHASHI, RUI
Executed: 2015-02-23
ISHITA, RYUUU
Executed: 2015-01-27
NARISHIGE, KAZUKI
Executed: 2015-01-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method