Patent Assignment
Reel/Frame 035349/0881
Assignment of Assignor's Interest
Recorded: 2015-04-07
Pages: 4
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Quaternary Ammonium Salt Compound, Composition for Forming a Resist Under Layer Film, and Patterning Process