Patent Assignment
Reel/Frame 035359/0343
Assignment of Assignor's Interest
Recorded: 2015-04-08
Pages: 3
Assignors
HASEBE, KAZUHIDE
Executed: 2015-03-31
MURAKAMI, HIROKI
Executed: 2015-03-31
KAKIMOTO, AKINOBU
Executed: 2015-03-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Amorphous Silicon Film Formation Method and Amorphous Silicon Film Formation Apparatus